| Type | Filed | Filer | Subject | Shares Owned | Percent Owned | |
|---|---|---|---|---|---|---|
| SC 13G/A | 2017-02-14 | PARADIGM CAPITAL MANAGEMENT INC/NY | MATTSON TECHNOLOGY INC | - | - | EDGAR |
| SC 13G/A | 2016-02-12 | AMERIPRISE FINANCIAL INC | MATTSON TECHNOLOGY INC | 13,425,667 | 17.8% | EDGAR |
| SC 13G/A | 2016-02-11 | PARADIGM CAPITAL MANAGEMENT INC/NY | MATTSON TECHNOLOGY INC | 4,388,900 | 5.8% | EDGAR |
| SC 13G | 2016-01-28 | BlackRock Inc. | MATTSON TECHNOLOGY INC | 4,427,776 | 5.9% | EDGAR |
| SC 13G | 2015-07-14 | Firsthand Capital Management, Inc. | MATTSON TECHNOLOGY INC | 3,780,000 | 5.0% | EDGAR |
| SC 13G/A | 2015-07-10 | AMERIPRISE FINANCIAL INC | MATTSON TECHNOLOGY INC | 12,217,415 | 16.3% | EDGAR |
| SC 13G | 2015-02-12 | PARADIGM CAPITAL MANAGEMENT INC/NY | MATTSON TECHNOLOGY INC | 4,679,500 | 6.3% | EDGAR |
| SC 13G | 2015-02-03 | DONALD SMITH & CO., INC. | MATTSON TECHNOLOGY INC | 2,572,160 | 3.5% | EDGAR |
| SC 13G | 2015-01-09 | AMERIPRISE FINANCIAL INC | MATTSON TECHNOLOGY INC | 7,820,505 | 10.6% | EDGAR |
| SC 13G | 2014-02-10 | DONALD SMITH & CO., INC. | MATTSON TECHNOLOGY INC | 3,226,777 | 5.5% | EDGAR |
| SC 13G | 2013-12-20 | Sanctuary Wealth Advisors, LLC | MATTSON TECHNOLOGY INC | 967,951 | 1.7% | EDGAR |
| SC 13D/A | 2013-07-12 | POTOMAC CAPITAL PARTNERS II LP | MATTSON TECHNOLOGY INC | 1,701,825 | 2.9% | EDGAR |
| SC 13G/A | 2013-07-10 | BlackRock Inc. | MATTSON TECHNOLOGY INC | 1,387,699 | 2.4% | EDGAR |
| SC 13G | 2013-02-13 | DONALD SMITH & CO., INC. | MATTSON TECHNOLOGY INC | 3,732,384 | 6.4% | EDGAR |
| SC 13G | 2013-01-30 | BlackRock Inc. | MATTSON TECHNOLOGY INC | 3,845,541 | 6.6% | EDGAR |
| SC 13D/A | 2012-06-18 | POTOMAC CAPITAL PARTNERS II LP | MATTSON TECHNOLOGY INC | 2,631,770 | 4.2% | EDGAR |
| SC 13G/A | 2012-02-14 | NWQ INVESTMENT MANAGEMENT CO LLC | MATTSON TECHNOLOGY INC | 2,898,590 | 5.0% | EDGAR |
| SC 13G | 2012-02-13 | DONALD SMITH & CO., INC. | MATTSON TECHNOLOGY INC | 3,713,843 | 6.4% | EDGAR |
| SC 13D | 2012-01-17 | POTOMAC CAPITAL PARTNERS II LP | MATTSON TECHNOLOGY INC | 2,913,866 | 5.0% | EDGAR |
| SC 13G/A | 2011-07-08 | BlackRock Inc. | MATTSON TECHNOLOGY INC | 1,240,069 | 2.2% | EDGAR |