| SC 13G | 2016-02-11 | WELLINGTON MANAGEMENT GROUP LLP | ENTEGRIS INC | 7,046,788 | 5.0% | EDGAR |
| SC 13G/A | 2016-02-10 | VANGUARD GROUP INC | ENTEGRIS INC | 9,647,092 | 6.9% | EDGAR |
| SC 13G/A | 2016-01-26 | BlackRock Inc. | ENTEGRIS INC | 7,561,934 | 5.4% | EDGAR |
| SC 13G/A | 2015-12-10 | EARNEST PARTNERS LLC | ENTEGRIS INC | 7,044,546 | 5.0% | EDGAR |
| SC 13G | 2015-12-10 | SHAPIRO CAPITAL MANAGEMENT LLC | ENTEGRIS INC | 0 | 0.0% | EDGAR |
| SC 13G/A | 2015-07-10 | EARNEST PARTNERS LLC | ENTEGRIS INC | 7,460,638 | 5.3% | EDGAR |
| SC 13G | 2015-03-19 | ENTEGRIS INC | INTERMOLECULAR INC | 2,384,182 | 4.9% | EDGAR |
| SC 13G | 2015-02-13 | SHAPIRO CAPITAL MANAGEMENT LLC | ENTEGRIS INC | 0 | 0.0% | EDGAR |
| SC 13G/A | 2015-02-11 | VANGUARD GROUP INC | ENTEGRIS INC | 8,622,414 | 6.2% | EDGAR |
| SC 13G/A | 2015-02-02 | BlackRock Inc. | ENTEGRIS INC | 7,573,482 | 5.4% | EDGAR |
| SC 13G | 2014-08-06 | SHAPIRO CAPITAL MANAGEMENT LLC | ENTEGRIS INC | 0 | 0.0% | EDGAR |
| SC 13G/A | 2014-04-10 | EARNEST PARTNERS LLC | ENTEGRIS INC | 7,006,326 | 5.0% | EDGAR |
| SC 13G/A | 2014-02-18 | GMT CAPITAL CORP | ENTEGRIS INC | 1,650,000 | 1.2% | EDGAR |
| SC 13G | 2014-02-14 | EARNEST PARTNERS LLC | ENTEGRIS INC | 7,371,065 | 5.3% | EDGAR |
| SC 13G/A | 2014-02-12 | VANGUARD GROUP INC | ENTEGRIS INC | 8,216,301 | 5.9% | EDGAR |
| SC 13G | 2014-02-11 | SHAPIRO CAPITAL MANAGEMENT LLC | ENTEGRIS INC | 0 | 0.0% | EDGAR |
| SC 13G/A | 2014-01-29 | BlackRock Inc. | ENTEGRIS INC | 7,944,731 | 5.7% | EDGAR |
| SC 13G/A | 2014-01-10 | FMR LLC | ENTEGRIS INC | 1,229,900 | 0.9% | EDGAR |
| SC 13G/A | 2013-02-14 | FMR LLC | ENTEGRIS INC | 8,112,836 | 5.9% | EDGAR |
| SC 13G/A | 2013-02-14 | CHILTON INVESTMENT CO LLC | ENTEGRIS INC | 3,877,000 | 2.8% | EDGAR |