AXCELIS TECHNOLOGIES INC filings

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SEC filings by AXCELIS TECHNOLOGIES INC (ownership)
TypeFiledFilerSubjectShares OwnedPercent Owned
SC 13G2006-01-27ARTISAN PARTNERS LTD PARTNERSHIPAXCELIS TECHNOLOGIES INC7,736,6007.7%EDGAR
SC 13G/A2006-01-10MELLON FINANCIAL CORPAXCELIS TECHNOLOGIES INC2,867,1772.8%EDGAR
SC 13G2005-02-16ZIFF ASSET MANAGEMENT LPAXCELIS TECHNOLOGIES INC5,123,9485.1%EDGAR
SC 13G/A2005-02-14FMR CORPAXCELIS TECHNOLOGIES INC12,994,71713.0%EDGAR
SC 13G/A2005-02-14WELLINGTON MANAGEMENT CO LLPAXCELIS TECHNOLOGIES INC2,920,2002.9%EDGAR
SC 13G/A2005-02-10MELLON FINANCIAL CORPAXCELIS TECHNOLOGIES INC11,470,13911.5%EDGAR
SC 13G/A2005-01-06STERLING CAPITAL MANAGEMENT LLCAXCELIS TECHNOLOGIES INC6,100,7326.2%EDGAR
SC 13G2004-12-10MELLON FINANCIAL CORPAXCELIS TECHNOLOGIES INC10,660,63110.7%EDGAR
SC 13G/A2004-09-10WELLINGTON MANAGEMENT CO LLPAXCELIS TECHNOLOGIES INC10,022,94710.0%EDGAR
SC 13G/A2004-08-10FMR CORPAXCELIS TECHNOLOGIES INC12,921,10113.0%EDGAR
SC 13G2004-02-17FMR CORPAXCELIS TECHNOLOGIES INC5,693,5005.8%EDGAR
SC 13G/A2004-02-12WELLINGTON MANAGEMENT CO LLPAXCELIS TECHNOLOGIES INC6,454,1446.5%EDGAR
SC 13G/A2004-02-06VANGUARD WINDSOR FUNDS/AXCELIS TECHNOLOGIES INC1,693,4001.7%EDGAR
SC 13G/A2004-01-09STERLING CAPITAL MANAGEMENT LLCAXCELIS TECHNOLOGIES INC3,678,9503.7%EDGAR
SC 13G/A2003-11-10WELLINGTON MANAGEMENT CO LLPAXCELIS TECHNOLOGIES INC6,431,4446.5%EDGAR
SC 13G/A2003-02-13FMR CORPAXCELIS TECHNOLOGIES INC4,045,8194.1%EDGAR
SC 13G/A2003-02-13VANGUARD WINDSOR FUNDS/AXCELIS TECHNOLOGIES INC6,700,5896.8%EDGAR
SC 13G/A2003-02-12WELLINGTON MANAGEMENT CO LLPAXCELIS TECHNOLOGIES INC9,959,53310.1%EDGAR
SC 13G2003-02-04STERLING CAPITAL MANAGEMENT LLCAXCELIS TECHNOLOGIES INC5,138,8005.2%EDGAR
SC 13G2002-02-13FMR CORPAXCELIS TECHNOLOGIES INC4,981,4825.1%EDGAR
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