AXCELIS TECHNOLOGIES INC filings

SEC filings by AXCELIS TECHNOLOGIES INC (ownership)
TypeFiledFilerSubjectShares OwnedPercent Owned
SC 13G/A2024-02-13VANGUARD GROUP INCAXCELIS TECHNOLOGIES INC4,040,91212.3%EDGAR
SC 13G/A2024-02-09Senvest Management, LLCAXCELIS TECHNOLOGIES INC00.0%EDGAR
SC 13G/A2024-01-19BlackRock Inc.AXCELIS TECHNOLOGIES INC6,088,68518.6%EDGAR
SC 13G/A2023-04-10VANGUARD GROUP INCAXCELIS TECHNOLOGIES INC3,523,89210.8%EDGAR
SC 13G/A2023-02-10Senvest Management, LLCAXCELIS TECHNOLOGIES INC1,786,4345.4%EDGAR
SC 13G/A2023-02-09VANGUARD GROUP INCAXCELIS TECHNOLOGIES INC3,012,2329.2%EDGAR
SC 13G/A2023-01-26BlackRock Inc.AXCELIS TECHNOLOGIES INC5,310,98216.2%EDGAR
SC 13G/A2023-01-20BlackRock Inc.AXCELIS TECHNOLOGIES INC5,310,98216.2%EDGAR
SC 13G2022-10-27Senvest Management, LLCAXCELIS TECHNOLOGIES INC1,676,9845.1%EDGAR
SC 13G/A2022-10-07PRIMECAP MANAGEMENT CO/CA/AXCELIS TECHNOLOGIES INC1,649,4665.0%EDGAR
SC 13G/A2022-02-10PRIMECAP MANAGEMENT CO/CA/AXCELIS TECHNOLOGIES INC2,094,8706.3%EDGAR
SC 13G/A2022-02-09Senvest Management, LLCAXCELIS TECHNOLOGIES INC1,054,8713.2%EDGAR
SC 13G/A2022-02-09VANGUARD GROUP INCAXCELIS TECHNOLOGIES INC2,672,9168.0%EDGAR
SC 13G/A2022-02-08DIMENSIONAL FUND ADVISORS LPAXCELIS TECHNOLOGIES INC1,575,5044.7%EDGAR
SC 13G/A2022-01-28BlackRock Inc.AXCELIS TECHNOLOGIES INC5,011,61515.0%EDGAR
SC 13G/A2021-02-12DIMENSIONAL FUND ADVISORS LPAXCELIS TECHNOLOGIES INC1,719,3625.1%EDGAR
SC 13G/A2021-02-12Senvest Management, LLCAXCELIS TECHNOLOGIES INC2,276,5026.8%EDGAR
SC 13G/A2021-02-12PRIMECAP MANAGEMENT CO/CA/AXCELIS TECHNOLOGIES INC2,498,1107.5%EDGAR
SC 13G/A2021-02-10VANGUARD GROUP INCAXCELIS TECHNOLOGIES INC2,274,1936.8%EDGAR
SC 13G/A2021-02-04WELLINGTON MANAGEMENT GROUP LLPAXCELIS TECHNOLOGIES INC1,609,3644.8%EDGAR