| SC 13G/A | 2010-07-09 | FMR LLC | ENTEGRIS INC | 192,700 | 0.1% | EDGAR |
| SC 13G | 2010-02-16 | FMR LLC | ENTEGRIS INC | 8,936,743 | 6.9% | EDGAR |
| SC 13G/A | 2010-02-12 | COOKE & BIELER LP | ENTEGRIS INC | 122,000 | 0.1% | EDGAR |
| SC 13G | 2010-02-12 | CHILTON INVESTMENT CO LLC | ENTEGRIS INC | 7,401,055 | 5.7% | EDGAR |
| SC 13G/A | 2010-02-08 | DIMENSIONAL FUND ADVISORS LP | ENTEGRIS INC | 3,347,751 | 2.6% | EDGAR |
| SC 13G | 2010-01-29 | BlackRock Inc. | ENTEGRIS INC | 12,114,116 | 9.3% | EDGAR |
| SC 13G/A | 2009-04-03 | PRIMECAP MANAGEMENT CO/CA/ | ENTEGRIS INC | 5,638,961 | 5.0% | EDGAR |
| SC 13G/A | 2009-03-30 | WELLS FARGO & CO/MN | ENTEGRIS INC | 0 | - | EDGAR |
| SC 13G/A | 2009-02-13 | PRICE T ROWE ASSOCIATES INC /MD/ | ENTEGRIS INC | 848,422 | 0.7% | EDGAR |
| SC 13G/A | 2009-02-13 | Catenacci Gerald | ENTEGRIS INC | 0 | 0.0% | EDGAR |
| SC 13G/A | 2009-02-12 | PRIMECAP MANAGEMENT CO/CA/ | ENTEGRIS INC | 5,634,961 | 5.0% | EDGAR |
| SC 13G/A | 2009-02-09 | DIMENSIONAL FUND ADVISORS INC | ENTEGRIS INC | 9,536,045 | 8.5% | EDGAR |
| SC 13G/A | 2009-02-09 | COOKE & BIELER LP | ENTEGRIS INC | 8,725,083 | 7.8% | EDGAR |
| SC 13G | 2009-02-05 | BARCLAYS GLOBAL INVESTORS NA /CA/ | ENTEGRIS INC | 3,950,366 | 3.5% | EDGAR |
| SC 13G/A | 2009-01-23 | WELLS FARGO & CO/MN | ENTEGRIS INC | 8,374,216 | 7.4% | EDGAR |
| SC 13G/A | 2008-12-03 | PRIMECAP MANAGEMENT CO/CA/ | ENTEGRIS INC | 5,634,961 | 5.0% | EDGAR |
| SC 13G/A | 2008-11-06 | PRIMECAP MANAGEMENT CO/CA/ | ENTEGRIS INC | 5,634,961 | 5.0% | EDGAR |
| SC 13G | 2008-09-04 | PRIMECAP MANAGEMENT CO/CA/ | ENTEGRIS INC | 5,680,505 | 5.0% | EDGAR |
| SC 13G/A | 2008-02-14 | Catenacci Gerald | ENTEGRIS INC | 181,028 | 0.2% | EDGAR |
| SC 13G/A | 2008-02-13 | PRICE T ROWE ASSOCIATES INC /MD/ | ENTEGRIS INC | 6,523,334 | 5.6% | EDGAR |