| SC 13G/A | 2013-02-13 | ALLIANCEBERNSTEIN L.P. | ENTEGRIS INC | 5,808,902 | 4.2% | EDGAR |
| SC 13G/A | 2013-02-11 | VANGUARD GROUP INC | ENTEGRIS INC | 7,674,295 | 5.6% | EDGAR |
| SC 13G | 2013-01-30 | BlackRock Inc. | ENTEGRIS INC | 7,283,522 | 5.3% | EDGAR |
| SC 13G/A | 2012-06-11 | FMR LLC | ENTEGRIS INC | 8,679,171 | 6.3% | EDGAR |
| SC 13G/A | 2012-04-11 | BlackRock Inc. | ENTEGRIS INC | 6,784,757 | 5.0% | EDGAR |
| SC 13G/A | 2012-02-14 | FMR LLC | ENTEGRIS INC | 15,658,356 | 11.6% | EDGAR |
| SC 13G/A | 2012-02-14 | CHILTON INVESTMENT CO LLC | ENTEGRIS INC | 8,082,622 | 6.0% | EDGAR |
| SC 13G/A | 2012-02-13 | BlackRock Inc. | ENTEGRIS INC | 8,157,533 | 6.0% | EDGAR |
| SC 13G | 2012-02-13 | ALLIANCEBERNSTEIN L.P. | ENTEGRIS INC | 9,350,118 | 6.9% | EDGAR |
| SC 13G | 2012-02-09 | VANGUARD GROUP INC | ENTEGRIS INC | 6,985,083 | 5.2% | EDGAR |
| SC 13G | 2011-11-10 | FMR LLC | ENTEGRIS INC | 14,450,065 | 10.7% | EDGAR |
| SC 13G/A | 2011-10-26 | GMT CAPITAL CORP | ENTEGRIS INC | 1,710,100 | 1.3% | EDGAR |
| SC 13G/A | 2011-09-14 | GMT CAPITAL CORP | ENTEGRIS INC | 1,509,500 | 1.1% | EDGAR |
| SC 13G/A | 2011-02-14 | CHILTON INVESTMENT CO LLC | ENTEGRIS INC | 12,520,755 | 9.5% | EDGAR |
| SC 13G/A | 2011-02-04 | BlackRock Inc. | ENTEGRIS INC | 10,091,857 | 7.6% | EDGAR |
| SC 13G/A | 2011-01-05 | GMT CAPITAL CORP | ENTEGRIS INC | 1,231,600 | 0.9% | EDGAR |
| SC 13G/A | 2010-11-09 | GMT CAPITAL CORP | ENTEGRIS INC | 1,044,700 | 0.8% | EDGAR |
| SC 13G/A | 2010-10-08 | CHILTON INVESTMENT CO LLC | ENTEGRIS INC | 13,322,420 | 10.1% | EDGAR |
| SC 13G/A | 2010-10-08 | GMT CAPITAL CORP | ENTEGRIS INC | 870,400 | 0.7% | EDGAR |
| SC 13G | 2010-09-16 | GMT CAPITAL CORP | ENTEGRIS INC | 701,800 | 0.5% | EDGAR |