| Type | Filed | Filer | Subject | Shares Owned | Percent Owned | |
|---|---|---|---|---|---|---|
| SC 13G/A | 2000-06-09 | - | - | - | - | EDGAR |
| SC 13G/A | 2000-02-14 | THERRIEN ROBERT J | BROOKS AUTOMATION INC | 1,299,864 | 9.6% | EDGAR |
| SC 13G/A | 2000-02-14 | THERRIEN ROBERT J | BROOKS AUTOMATION INC | 1,299,864 | 9.6% | EDGAR |
| SC 13G/A | 2000-02-14 | THERRIEN ROBERT J | BROOKS AUTOMATION INC | 1,299,864 | 9.6% | EDGAR |
| SC 13G/A | 2000-02-09 | PROVIDENT INVESTMENT COUNSEL | BROOKS AUTOMATION INC | 797,650 | 6.3% | EDGAR |
| SC 13G/A | 2000-02-09 | PROVIDENT INVESTMENT COUNSEL | BROOKS AUTOMATION INC | 797,650 | 6.3% | EDGAR |
| SC 13G/A | 2000-02-09 | PROVIDENT INVESTMENT COUNSEL | BROOKS AUTOMATION INC | 797,650 | 6.3% | EDGAR |
| SC 13G/A | 2000-02-08 | PROVIDENT INVESTMENT COUNSEL | BROOKS AUTOMATION INC | 612,350 | 4.8% | EDGAR |
| SC 13G/A | 2000-02-08 | PROVIDENT INVESTMENT COUNSEL | BROOKS AUTOMATION INC | 612,350 | 4.8% | EDGAR |
| SC 13G/A | 2000-02-08 | PROVIDENT INVESTMENT COUNSEL | BROOKS AUTOMATION INC | 612,350 | 4.8% | EDGAR |
| SC 13G/A | 2000-02-04 | KOPP INVESTMENT ADVISORS INC | BROOKS AUTOMATION INC | 1,218,139 | - | EDGAR |
| SC 13G/A | 2000-02-04 | KOPP INVESTMENT ADVISORS INC | BROOKS AUTOMATION INC | 1,218,139 | - | EDGAR |
| SC 13G/A | 2000-02-04 | KOPP INVESTMENT ADVISORS INC | BROOKS AUTOMATION INC | 1,218,139 | - | EDGAR |
| SC 13G/A | 2000-02-02 | STATE OF WISCONSIN INVESTMENT BOARD | BROOKS AUTOMATION INC | 100,000 | 0.9% | EDGAR |
| SC 13G/A | 2000-02-02 | STATE OF WISCONSIN INVESTMENT BOARD | BROOKS AUTOMATION INC | 100,000 | 0.9% | EDGAR |
| SC 13G/A | 2000-02-02 | STATE OF WISCONSIN INVESTMENT BOARD | BROOKS AUTOMATION INC | 100,000 | 0.9% | EDGAR |
| SC 13G/A | 2000-01-27 | MELLON FINANCIAL CORP | BROOKS AUTOMATION INC | 505,394 | 4.5% | EDGAR |
| SC 13G/A | 2000-01-27 | MELLON FINANCIAL CORP | BROOKS AUTOMATION INC | 505,394 | 4.5% | EDGAR |
| SC 13G/A | 2000-01-27 | MELLON FINANCIAL CORP | BROOKS AUTOMATION INC | 505,394 | 4.5% | EDGAR |