| Type | Filed | Filer | Subject | Shares Owned | Percent Owned | |
|---|---|---|---|---|---|---|
| SC 13G/A | 2024-02-13 | VANGUARD GROUP INC | ONTO INNOVATION INC. | 5,188,815 | 10.6% | EDGAR |
| SC 13G/A | 2024-01-23 | BlackRock Inc. | ONTO INNOVATION INC. | 6,145,448 | 12.5% | EDGAR |
| SC 13G/A | 2023-02-09 | VANGUARD GROUP INC | ONTO INNOVATION INC. | 5,605,334 | 11.3% | EDGAR |
| SC 13G/A | 2023-01-23 | BlackRock Inc. | ONTO INNOVATION INC. | 8,009,729 | 16.2% | EDGAR |
| SC 13G/A | 2022-02-10 | VANGUARD GROUP INC | ONTO INNOVATION INC. | 5,353,152 | 10.9% | EDGAR |
| SC 13G/A | 2022-01-27 | BlackRock Inc. | ONTO INNOVATION INC. | 7,783,210 | 15.8% | EDGAR |
| SC 13G/A | 2022-01-25 | BlackRock Inc. | ONTO INNOVATION INC. | 7,783,210 | 15.8% | EDGAR |
| SC 13G/A | 2021-07-12 | VANGUARD GROUP INC | ONTO INNOVATION INC. | 5,118,760 | 10.4% | EDGAR |
| SC 13G/A | 2021-02-12 | DIMENSIONAL FUND ADVISORS LP | ONTO INNOVATION INC. | 1,948,140 | 4.0% | EDGAR |
| SC 13G/A | 2021-02-10 | VANGUARD GROUP INC | ONTO INNOVATION INC. | 3,116,062 | 6.4% | EDGAR |
| SC 13G/A | 2021-02-04 | WELLINGTON MANAGEMENT GROUP LLP | ONTO INNOVATION INC. | 1,961,529 | 4.0% | EDGAR |
| SC 13G | 2021-01-25 | BlackRock Inc. | ONTO INNOVATION INC. | 7,533,940 | 15.4% | EDGAR |
| SC 13G/A | 2020-02-12 | VANGUARD GROUP INC | Onto Innovation Inc. | 3,018,789 | 6.0% | EDGAR |
| SC 13G/A | 2020-02-12 | DIMENSIONAL FUND ADVISORS LP | Onto Innovation Inc. | 3,325,492 | 6.6% | EDGAR |
| SC 13G | 2020-02-04 | BlackRock Inc. | Onto Innovation Inc. | 8,099,875 | 16.2% | EDGAR |
| SC 13G | 2020-01-28 | WELLINGTON MANAGEMENT GROUP LLP | Onto Innovation Inc. | 3,533,008 | 7.1% | EDGAR |
| SC 13G/A | 2019-02-13 | FMR LLC | NANOMETRICS INC | 1,046,490 | 4.3% | EDGAR |
| SC 13G/A | 2019-02-11 | VANGUARD GROUP INC | NANOMETRICS INC | 1,838,726 | 7.6% | EDGAR |
| SC 13G/A | 2019-02-08 | DIMENSIONAL FUND ADVISORS LP | NANOMETRICS INC | 1,589,168 | 6.5% | EDGAR |
| SC 13G/A | 2019-01-31 | BlackRock Inc. | NANOMETRICS INC | 3,643,493 | 15.0% | EDGAR |